Laser additive manufacturing of Si/ZrO<sub>2</sub> tunable crystalline phase 3D nanostructures

The current study is directed to the rapidly developing field of inorganic material 3D object production at nano-/micro scale. fabrication method includes laser lithography hybrid organic-inorganic materials with subsequent heat treatment leading a variety crystalline phases in structures. In this work, it was examined series organometallic polymer precursors different silicon (Si) and zirconium (Zr) molar ratios, ranging from 9:1 5:5, prepared via sol-gel method. All mixtures were for perspective be used manufacturing by fabricating nano- micro-feature sized Their spatial downscaling surface morphology evaluated depending on chemical composition crystallographic phase. appearance phase proven using single-crystal X-ray diffraction analysis, which revealed lower crystallization temperature microstructures compared bulk materials. Fabricated objects retained complex geometry without any distortion after up 1400 °C. Under proper conditions, wide as well zircon (ZrSiO4 - highly stable material) can observed. addition, highest new record achieved resolution below 60 nm has been reached. proposed preparation protocol manufacture micro/nano-devices high precision resistance aggressive environment.